The Nanotech West Lab (NTW) has just completed the installation of a new Diener Pico(R) plasma asher. The asher, designated ASH01 in the NTW tool database, is located in Bay 3 of the cleanroom. The asher vacuum system is completely oil-free, being pumped by a dry scroll pump. It fills a need of many users for a low-damage oxygen plasma …
Stepping into 0.60um Features in Bay 2
Just about a year ago, we installed a GCA 6100 stepper into the photolithography area of our cleanroom. The stepper complements very nicely the capabilities of the contact aligners and our Vistec EBPG5000 direct-write electron beam lithography tool. The contact aligners are capable of exposing features as big as your substrate consistently across the wafer in a few seconds, but …
Peter Janney Joins Nanotech West Staff
Earlier this month, Mr. Peter Janney III joined the Nanotech West Staff as a Laboratory Services Coordinator. Pete comes to us with over 20 years of experience in the DVD/CDROM replication industry. As a result, he has significant experience in vacuum systems (including thin film metallization tools), robotic and PLC-controlled production tools, computer networking, and electromechanical troubleshooting. He also has …
Nanotech West Orders Silicon Drift Detector (SDD)
The Ohio State Nanotech West Lab has ordered an advanced silicon drift detector (SDD) for our Carl Zeiss SMT Ultra 55 Plus(R) field-emission scanning microscope (FESEM, tool ID SEM02). The instrument will arrive sometime in the month of December installation. Availability of the detector and training on its use will be announced to the SEM listserv. Silicon drift detectors are …
Ohio State to host Solar Durability Workshop
The Ohio State node of the Wright Center for Photovoltaics Innovation and Commercialization (PVIC) announces that it will host a Solar Durability Workshop on the OSU campus on Thursday, 29 September 2011. The current agenda can be found here, and features talks by internationally known solar durability/reliability experts such as Dr. David Miller of NREL, Prof. Stanislaus Wong of SUNY/Brookhaven, …
Woollam alpha-SE Spectroscopic Ellipsometer
Our new Woollam alpha-SE spectroscopic ellipsometer has arrived and has been installed in Bay 3. We expect to be training users shortly. Contact Dr. John Carlin at carlin.9 at osu.edu for more information. The instrument has a wavelength range of 380 – 900 nm using 180 data channels, corresponding to a ~ 3 nm resolution. The purchase was funded by …
GCA 6100 Stepper Operational
The new (well, new to us) GCA 6100C I-line stepper is now operational in Bay 2 of the cleanroom. Contact Derek Ditmer (ditmer.2 at osu.edu) for training. We are very grateful to the Wright-Patterson Air Force Base of Dayton, OH for donation of the tool. Bob Davis Director, OSU Nanotech West Lab