User Fees

DescriptionOSU AcademicNon-OSU AcademicNon-Academic
Direct Staff Time$100.00/hr$100.00/hr$100.00/hr
Cleanroom Access$60.00/day ($300.00/month)$93.60/day ($468.00/month)$115.00/day ($575.00/month)
AFM04 - Veeco Icon 3 AFM$17.85/hre$27.85/hre$35.70/hre
ALD01 - Picosun R-150B ALD$80.00 + Source/runf$123.20 + Source/runf$160 + Source/runf
ALN01/ALN02/ALN03 - Contact Aligner$23.10/hr$36.04/hr$46.20/hr
ASH01 - Diener Pico Oxygen Pla$10.50/hr$16.38/hr$21.00/hr
BND01 - EV 520 Bonder$15.00/hr$23.40/hr$28.00/hr
BND03 - Wire Bonder$15.00/hr$23.40/hr$40.00/hr
BND05 - Ball Bonder$15.00/hr$23.40/hr$40.00/hr
COT02,03,04 - Spin Coater$6.50/hr$10.14/hr$13.00/hr
CVD01 - Axitron MOCVDVariesgVariesgVariesg
CVD02 - Plasma-Therm 790 PECVD$28.35/hr$44.23/hr$56.70/hr
CVD03 - Nitride MOCVDVariesgVariesgVariesg
CVD04 - GaO and AlGaO MOCVDVariesgVariesgVariesg
EBL01 - Tool time$84.00/hr$131.04/hrQuoted
EBL01 Job Assist
4" Photomasks
5" Photomasks/Reticle
ETC01 - Technics 800 RIE$11.00/hr$17.16/hr$22.00/hr
ETC04 - Plasma-Therm ICP RIE$35.70/hr$55.69/hr$71.40/hr
ETC05 - Plasma-Therm ICP DRIE$35.70/hr$55.69/hr$71.40/hr
EVP01 - Denton 502A Evaporator$35.00/hr$54.60/hr$70.00/hr
EVP03 - CHA Evaporator$41.00/hr$63.96/hr$82.00/hr
EVP05 - Denton 502A Evaporator$35.00/hr$54.60/hr$70.00/hr
INS09 - Optical Profilometer$5.00/hr$7.80/hr$25.00/hr
POL01/02 - Lapper & Polisher$40.00/use$62.50/use$80.00/use
PRB05 - Electrical Optical Test Table$20.00/hr$31.20/hr$50.00/hr
PRB06 - Unisom Solar Simulator$10.00/hr$15.60/hr$20.00/hr
PRB07 - Cryo Probe Station$10.00/hr$15.60/hr$35.00/hr
PRB08 - IR QE Measurement$10.00/hr$15.60/hr$35.00/hr
PVD01 - Hummer Sputter Tool$10.50/hr$16.38/hr$21.00/hr
PVD03 - AJA Sputter Tool$25.20/hr$39.31/hr$50.40/hr
RTA01/02 - Rapid Thermal Anneal$22.05/hr$34.40/hr$44.10/hr
SAW01 - K&S Dicing Saw$15.00/hrh$23.40/hrh$50.00/hrh
SEM01 - Hitachi S-3000 SEM$20.00/hr$31.20/hr$50.00/hr
SEM02 - Zeiss Ultra 55 Plus FE$60.00/hr$93.60/hr$175.00/hr
STP01 - GCA stepper$23.10/hr$36.04/hr$46.20/hr
TUB01 - LP-CVD Polysilicon$10.00/hr$15.60/hr$20.00/hr
TUB02 - Nitride Furnace Tube$45.00/hr$70.20/hr$90.00/hr
TUB03 - Annealing / Diffusion$22.00/hr ($110.00/use)i$34.32/hr ($171.60/use)i$44.00/hr ($220.00/use)i
TUB04 - Oxidation Furnace Tube$22.00/hr ($110.00/use)i$34.32/hr ($171.60/use)i$44.00/hr ($220.00/use)i
TUB05 - SSP-354 furnace tube$10.50/hr$16.38/hr$21.00/hr
TUB06 - Tube Furnace$10.00/hr ($40.00/use)i$15.60/hr ($62.40/use)i$20.00/hr ($80.00/use)i
MICA Lab Access$50.00/day$78.00/dayVariesg
Small Supplies (as available)Cost+20%Cost+20%Cost+20%
Gold, Palladium, and Platinum for evaporationCost+20%Cost+20%Cost+20%


  1. All hourly charges are billed at a half hour minimum per single use, and billed to tenths of hours thereafter.
  2. OSU Nanotech West capabilities not listed in the above rate schedule incur no usage charges, or may be unavailable to general users.
  3. User training incurs no equipment charges or staff time charges but does incur cleanroom entrance fees if applicable.
  4. New users will be charged a $10 fee for key fob and user/account set-up.
  5. User must supply AFM probe tips. Contact staff for available inventory or part numbers.
  6. Plus cost of precursor used.
  7. Contact staff for pricing.
  8. Contact staff for availability of blades.
  9. For oxidation and diffusion furnace runs of more than 8 hours contact staff for pricing.