User Fees
| Description | OSU Academic | Non-OSU Academic | Non-Academic |
|---|---|---|---|
| AFM04 - Veeco Icon 3 AFM | $20.24/hr + AFM tips | $33.47/hr + AFM tips | $42.50/hr + AFM tips |
| ALD01 - Picosun R-150B ALD | $100.02 + Source/run | $157.54 + Source/run | $200.05 + Source/run |
| ALN02/ALN03 - Contact Aligner | $28.89/hr | $45.49/hr | $57.77/hr |
| ASH01 - Diener Pico Oxygen Plasma Asher | $13.14/hr | 20.69/hr | 26.27/hr |
| BMR01 - GenISYS Beamer & Tracer Software | $25.00/hr | $25.00/hr | $25.00/hr |
| BND03 - Wire Bonder | 18.75/hr | 29.54/hr | 50.01/hr |
| BND04 - Flip Chip Bonder | 59.54/hr | $93.77/hr | $119.07/hr |
| BND05 - Ball Bonder | $17.86/hr | $29.54/hr | $50.01/hr |
| COT02,03,04,05 - Spin Coater | $8.13/hr | $12.80/hr | $16.26/hr |
| CVD01 - Axitron MOCVD | Variesa | Variesa | Variesa |
| CVD02 - Plasma-Therm 790 PECVD | $35.45/hr | $55.83/hr | $70.90/hr |
| CVD03 - Nitride MOCVD | Variesa | Variesa | Variesa |
| CVD04 - GaO and AlGaO MOCVD | Variesa | Variesa | Variesa |
| EBL02 - Raith EBPG 5150 | $150.00/hrc | $236.25/hrc | $450.00/hrc |
| ENV01 - Environmental Chamber | $5.95/hr | $9.84/hr | $12.50/hr |
| ETC01 - Technics 800 RIE | $13.76/hr | $21.66/hr | $27.51/hr |
| ETC04 - Plasma-Therm ICP RIE | $44.64/hr | $70.60/hr | $89.28/hr |
| ETC05 - Plasma-Therm ICP DRIE | $44.64/hr | $70.60/hr | $89.28/hr |
| ETC06 - PlasmaTherm Takachi ICP-RIE | $44.64/hr | $70.60/hr | $89.28/hr |
| EVP01 - Denton 502A Evaporator | $43.76/hr | $68.93/hr | $87.53/hr |
| EVP03 - CHA Evaporator | $51.26/hr | $80.74/hr | $102.52/hr |
| EVP05 - Denton 502A Evaporator | $43.76/hr | $68.93/hr | $87.53/hr |
| INS09 - Optical Profilometer | $6.25/hr | $9.84/hr | $31.25/hr |
| MLA01 - Heidelberg MLA150 | $28.88/hr | $45.48/hr | $57.75/hr |
| MLA02 - Heidelberg MLA150 1 µm | $62.00/hr | $97.65/hr | $124.00/hr |
| POL01/02 - Lapper & Polisher | $47.63/use | $78.77/hr | $100.02/hr |
| PRB05 - Electrical Optical Test Table | $15.75/hr | $26.05/hr | $49.61/hr |
| PRB06 - Unisom Solar Simulator | $11.91/hr | $19.70/hr | $25.01/hr |
| PRB07 - Cryo Probe Station | $15.75/hr | $26.05/hr | $49.61/hr |
| PRB08 - IR QE Measurement | $15.75/hr | $26.05/hr | $49.61/hr |
| PRB10 - IR Camera | $262.50/sample | $434.11/sample | $826.88/sample |
| PRB11 - 8D PL and Lifetime Mapping | $15.75/hr | $26.05/hr | $49.61/hr |
| PRB12 - Signatone Room Temperature Probe Station | $5.40/hr | $8.42/hr | $10.80/hr |
| PRT01 - Ultimaker 2+ 3D Printer | $10.80/hr | $16.85/hr | $21.60/hr |
| PVD01 - Hummer Sputter Tool | $12.51/hr | $20.69/hr | $26.27/hr |
| PVD03 - AJA Sputter Tool | $31.50/hr | $49.61/hr | $63.00/hr |
| PVD04 - Cressington 108 Auto/SE Sputter Coater | |||
E-beam sample coat (Au) | $17.81/run | $28.05/run | $35.62/run |
SEM sample coat (Au) | $9.37/run | $14.75/run | $28.05/run |
| RTA02 - Rapid Thermal Anneal | $27.56/hr | $43.41/hr | $55.13/hr |
| SAW02 - ADT 7122 Dicing Saw | $23.81/hra | $37.51/hra | $89.30/hra |
| SEM01 - Hitachi S-3000 SEM | $28.35/hr | $46.88/hr | $65.49/hr |
| SEM02 - Zeiss Ultra 55 Plus FE | $75.01/hr | $118.14/hr | $218.74/hr |
| TUB01 - LP-CVD Polysilicon | $12.51/hra | $19.70/hra | $25.01/hra |
| TUB02 - Nitride Furnace Tube | $56.26/hra | $88.61/hra | $112.52/hra |
| TUB03 - Annealing / Diffusion | $27.51/hra | $43.33/hra | $55.02/hra |
| TUB04 - Oxidation Furnace Tube | $27.51/hra | $43.33/hra | $55.05/hra |
| TUB05 - SSP-354 furnace tube | $12.51/hr | $20.69/hr | $26.27/hr |
| TUB06 - Tube Furnace | $12.51/hr ($50.04/use) | $19.70/hr ($77.60/use) | $25.01/hr ($100.04/use) |
| XFR01 - Microtransfer Printer | $42/hr | $66.15/hr | $100/hr |
| XRD01 - Bruker D8 XRD | $34.02/hr | $56.26/hr | $71.44/hr |
| Cleanroom Access | $75.01/day ($375.05/month) | $118.14/day ($590.70/month) | $150.02/day ($750.10/month) |
| CVD Lab Access | |||
For CVD01 use | $85.05/day | $132.68/day | $226.80/day |
For CVD03/04 use | $56.70/day | $87.32/day | $113.40/day |
| EIL Lab Access | $56.70/day | $93.77/day | $119.07/day |
Furnace | $7.50/hr | $11.70/hr | $15.00/hr |
ARE-310 Mixer | $50.00/run | $78.00/run | $100.00/run |
Coating | $100.00/hr | $156.00/hr | $200.00/hr |
Calendering | $100.00/hr | $156.00/hr | $200.00/hr |
Coin Cell Fabrication | $100.00/hr | $156.00/hr | $200.00/hr |
Pouch Cell Assembly | $100.00/hr | $156.00/hr | $200.00/hr |
| MICA Tool Access | $78.75/useb | $130.23/useb | $248.06/useb |
| OEM Lab Access | $11.34/day ($56.70/month) | $18.75/day ($93.75/month) | $23.81/day ($119.05/month) |
| Small Supplies (as available) | Cost+20% | Cost+20% | Cost+20% |
| Direct Staff Time | $115/hr | $115/hr | $115/hr |
| New User Fob and Set Up | $20.00 | $20.00 | $20.00 |
| User Training | $54.08/hr + access | $54.08/hr + access | $54.08/hr + access |
Notes
- Unless otherwise stated, hourly rates are billed at a half (0.5) hour minimum per individual use and billed to tenths of hours thereafter.
- Contact staff for assisted tool use, materials compatibility, and/or tool rates not listed.
- MICA tool access applies to tools PRB05, PRB07, PRB08, PRB10, PRB11 and capped at 10 charges per month.
- Billed at one (1) hour minimum per individual use.