User Fees
| Description | OSU Academic | Non-OSU Academic | Non-Academic |
|---|---|---|---|
| AFM04 - Veeco Icon 3 AFM | $17.85/hre | $27.85/hre | $35.70/hre |
| ALD01 - Picosun R-150B ALD | $84.00 + Source/runf | $129.36 + Source/runf | $168 + Source/runf |
| ALN01/ALN02/ALN03 - Contact Aligner | $24.26/hr | $37.84/hr | $48.51/hr |
| ASH01 - Diener Pico Oxygen Pla | $11.03/hr | $17.20/hr | $22.05/hr |
| BND01 - EV 520 Bonder | $15.75/hr | $24.57/hr | $29.40/hr |
| BND03 - Wire Bonder | $15.75/hr | $24.57/hr | $42.00/hr |
| BND04 - Flip Chip Bonder | $50.00/hr | $78.50/hr | $100/hr |
| BND05 - Ball Bonder | $15.75/hr | $24.57/hr | $42.00/hr |
| COT02,03,04,05 - Spin Coater | $6.83/hr | $10.65/hr | $13.65/hr |
| CVD01 - Axitron MOCVD | Variesg | Variesg | Variesg |
| CVD02 - Plasma-Therm 790 PECVD | $29.77/hr | $46.44/hr | $59.54/hr |
| CVD03 - Nitride MOCVD | Variesg | Variesg | Variesg |
| CVD04 - GaO and AlGaO MOCVD | Variesg | Variesg | Variesg |
| EBL01 - Tool time | $88.20/hr | $137.59/hr | Quoted |
EBL01 Job Assist | $105.00/hr | $105.00/hr | $105.00/hr |
4" Photomasks | $550.00 | $550.00 | $770.00 |
5" Photomasks/Reticle | $660.00 | $660.00 | $880.00 |
| ENV01 - Environmental Chamber | $5.25/hr | $8.19/hr | $10.50/hr |
| ETC01 - Technics 800 RIE | $11.55/hr | $18.02/hr | $23.10/hr |
| ETC04 - Plasma-Therm ICP RIE | $37.49/hr | $58.47/hr | $74.97/hr |
| ETC05 - Plasma-Therm ICP DRIE | $37.49/hr | $58.47/hr | $74.97/hr |
| EVP01 - Denton 502A Evaporator | $36.75/hr | $57.33/hr | $73.50/hr |
| EVP03 - CHA Evaporator | $43.05/hr | $67.16/hr | $86.10/hr |
| EVP05 - Denton 502A Evaporator | $36.75/hr | $57.33/hr | $73.50/hr |
| INS09 - Optical Profilometer | $5.25/hr | $8.19/hr | $26.25/hr |
| MLA01 - Heidelberg MLA150 | $24.25/hr | $37.84/hr | $48.51/hr |
| POL01/02 - Lapper & Polisher | $42.00/use | $65.52/use | $84.00/use |
| PRB05 - Electrical Optical Test Table | $15.00/hr | $23.55/hr | $45.00/hr |
| PRB06 - Unisom Solar Simulator | $10.50/hr | $16.38/hr | $21.00/hr |
| PRB07 - Cryo Probe Station | $15.00/hr | $23.55/hr | $45.00/hr |
| PRB08 - IR QE Measurement | $15.00/hr | $23.55/hr | $45.00/hr |
| PRB10 - IR Camera | $250/sample | $392.50/sample | $750/sample |
| PRB11 - 8D PL and Lifetime Mapping | $15.00/hr | $23.55/hr | $45.00/hr |
| PVD01 - Hummer Sputter Tool | $11.03/hr | $17.20/hr | $22.05/hr |
| PVD03 - AJA Sputter Tool | $26.46/hr | $41.28/hr | $52.92/hr |
| PVD04 - Cressington Sputter Coater | $5.50/run + Au use/runk | $8.58/run + Au use/runk | $11.00/run + Au use/runk |
| RTA01/02 - Rapid Thermal Anneal | $23.15/hr | $36.12/hr | $46.31/hr |
| SAW02 - ADT 7122 Dicing Saw | $20.00/hrh | $31.40/hrh | $75.00/hrh |
| SEM01 - Hitachi S-3000 SEM | $25.00/hr | $39.25/hr | $55.00/hr |
| SEM02 - Zeiss Ultra 55 Plus FE | $63.00/hr | $98.28/hr | $183.75/hr |
| STP01 - GCA stepper | $24.26/hr | $37.84/hr | $48.51/hr |
| TUB01 - LP-CVD Polysilicon | $10.50/hr | $16.38/hr | $21.00/hr |
| TUB02 - Nitride Furnace Tube | $47.25/hr | $73.71/hr | $94.50/hr |
| TUB03 - Annealing / Diffusion | $23.10/hr ($115.50/use)i | $36.04/hr ($182.20/use)i | $46.20/hr ($231.00/use)i |
| TUB04 - Oxidation Furnace Tube | $23.10/hr ($115.50/use)i | $36.04/hr ($182.20/use)i | $46.20/hr ($231.00/use)i |
| TUB05 - SSP-354 furnace tube | $11.03/hr | $17.20/hr | $22.05/hr |
| TUB06 - Tube Furnace | $10.50/hr ($42.00/use)i | $16.38/hr ($65.52/use)i | $21.00/hr ($84.00/use)i |
| XRD01 - Bruker D8 XRD | $30.00/hr | $47.10/hr | $60.00/hr |
| Cleanroom Access | $63.00/day ($315.00/month) | $98.28/day ($491.40/month) | $120.75/day ($603.75/month) |
| EIL/ESH Lab Access | $50/day | $78/day | $100.00/day |
| M4 Lab Access | $50/day | ||
| MICA Tool Access | $75.00/usej | $118.00/usej | $225.00/usej |
| Metrology Lab Access | $10.00/day (capped at $50.00/mo) | $15.60/day (capped at $78.00/mo) | $20.00/day (capped at $100.00/mo) |
| Small Supplies (as available) | Cost+20% | Cost+20% | Cost+20% |
| Direct Staff Time | $105.00/hr | $105.00/hr | $105.00/hr |
Notes
- All hourly charges are billed at a half hour minimum per single use, and billed to tenths of hours thereafter.
- OSU Nanotech West capabilities not listed in the above rate schedule incur no usage charges, or may be unavailable to general users.
- User training incurs no equipment charges or staff time charges but does incur cleanroom entrance fees if applicable.
- New users will be charged a $10 fee for key fob and user/account set-up.
- User must supply AFM probe tips. Contact staff for available inventory or part numbers.
- Plus cost of precursor used.
- Contact staff for pricing.
- Contact staff for availability of blades.
- For oxidation and diffusion furnace runs of more than 8 hours contact staff for pricing.
- MICA Tool access applies to tools PRB05, PRB07, PRB08, PRB10, PRB11
- Gold use with EBL01 coat is $9.92/run, with SEM02 coat is $2.48/run