User Fees
| Description | OSU Academic | Non-OSU Academic | Non-Academic |
|---|---|---|---|
| AFM04 - Veeco Icon 3 AFM | $18.74/hre | $29.24/hre | $37.49/hre |
| ALD01 - Picosun R-150B ALD | $88.20 + Source/runf | $135.83 + Source/runf | $176.40 + Source/runf |
| ALN01/ALN02/ALN03 - Contact Aligner | $25.47/hr | $39.73/hr | $50.94/hr |
| ASH01 - Diener Pico Oxygen Pla | $11.58/hr | $18.06/hr | $23.15/hr |
| BND01 - EV 520 Bonder | $16.54/hr | $18.06/hr | $30.87/hr |
| BND03 - Wire Bonder | $16.54/hr | $25.80/hr | $44.10/hr |
| BND04 - Flip Chip Bonder | $52.50/hr | $82.43/hr | $105.00/hr |
| BND05 - Ball Bonder | $16.54/hr | $25.80/hr | $44.10/hr |
| COT02,03,04,05 - Spin Coater | $7.17/hr | $11.18/hr | $14.33/hr |
| CVD01 - Axitron MOCVD | Variesg | Variesg | Variesg |
| CVD02 - Plasma-Therm 790 PECVD | $31.26/hr | $48.76/hr | $62.52/hr |
| CVD03 - Nitride MOCVD | Variesg | Variesg | Variesg |
| CVD04 - GaO and AlGaO MOCVD | Variesg | Variesg | Variesg |
| EBL01 - Tool time | $92.61/hr | $144.47/hr | Quoted |
EBL01 Job Assist | $110.25/hr | $110.25/hr | $110.25/hr |
4" Photomasks | $577.50 | $577.50 | $808.50 |
5" Photomasks/Reticle | $693.00 | $693.00 | $924.00 |
| ENV01 - Environmental Chamber | $5.51/hr | $8.60/hr | $11.03/hr |
| ETC01 - Technics 800 RIE | $12.13/hr | $18.92/hr | $24.26/hr |
| ETC04 - Plasma-Therm ICP RIE | $39.36/hr | $61.39/hr | $78.72/hr |
| ETC05 - Plasma-Therm ICP DRIE | $39.36/hr | $61.39/hr | $78.72/hr |
| EVP01 - Denton 502A Evaporator | $38.59/hr | $60.20/hr | $77.18/hr |
| EVP03 - CHA Evaporator | $45.20/hr | $70.52/hr | $90.41/hr |
| EVP05 - Denton 502A Evaporator | $38.59/hr | $60.20/hr | $77.18/hr |
| INS09 - Optical Profilometer | $5.51/hr | $8.60/hr | $27.56/hr |
| MLA01 - Heidelberg MLA150 | $25.46/hr | $39.73/hr | $50.94/hr |
| POL01/02 - Lapper & Polisher | $44.10/use | $68.80/use | $88.20/use |
| PRB05 - Electrical Optical Test Table | $15.75/hr | $24.73/hr | $47.25/hr |
| PRB06 - Unisom Solar Simulator | $11.03/hr | $17.20/hr | $22.05/hr |
| PRB07 - Cryo Probe Station | $15.75/hr | $24.73/hr | $47.25/hr |
| PRB08 - IR QE Measurement | $15.75/hr | $24.73/hr | $47.25/hr |
| PRB10 - IR Camera | $262.50/sample | $412.13/sample | $787.50/sample |
| PRB11 - 8D PL and Lifetime Mapping | $15.75/hr | $24.73/hr | $47.25/hr |
| PVD01 - Hummer Sputter Tool | $11.58/hr | $18.06/hr | $23.15/hr |
| PVD03 - AJA Sputter Tool | $27.78/hr | $43.34/hr | $55.57/hr |
| PVD04 - Cressington Sputter Coater | $5.78/run + Au use/runk | $9.01/run + Au use/runk | $11.55/run + Au use/runk |
| RTA01/02 - Rapid Thermal Anneal | $24.31/hr | $37.93/hr | $48.63/hr |
| SAW02 - ADT 7122 Dicing Saw | $21.00/hrh | $32.97/hrh | $78.75/hrh |
| SEM01 - Hitachi S-3000 SEM | $26.25/hr | $41.21/hr | $57.75/hr |
| SEM02 - Zeiss Ultra 55 Plus FE | $66.15/hr | $103.19/hr | $192.94/hr |
| STP01 - GCA stepper | $25.47/hr | $39.73/hr | $50.94/hr |
| TUB01 - LP-CVD Polysilicon | $11.03/hr | $17.20/hr | $22,05/hr |
| TUB02 - Nitride Furnace Tube | $49.61/hr | $77.40/hr | $99.23/hr |
| TUB03 - Annealing / Diffusion | $24.26/hr ($121.28/use)i | $37.84/hr ($189.21/use)i | $48.51/hr ($242.55/use)i |
| TUB04 - Oxidation Furnace Tube | $24.26/hr ($121.28/use)i | $37.84/hr ($189.21/use)i | $48.51/hr ($242.55/use)i |
| TUB05 - SSP-354 furnace tube | $11.58/hr | $18.06/hr | $23.15/hr |
| TUB06 - Tube Furnace | $11.03/hr ($44.10/use)i | $17.20/hr ($68.80/use)i | $22.05/hr ($88.20/use)i |
| XRD01 - Bruker D8 XRD | $31.50/hr | $49.46/hr | $63.00/hr |
| Cleanroom Access | $66.15/day ($330.75/month) | $103.19/day ($515.95/month) | $126.79/day ($633.95/month) |
| EIL/ESH Lab Access | $52.50/day | $81.90/day | $105.00/day |
| M4 Lab Access | $52.50/day | ||
| MICA Tool Access | $78.75/usej | $123.90/usej | $236.25/usej |
| OEM Lab Access | $10.50/day (capped at $52.50/mo) | $16.38/day (capped at $81.90/mo) | $21.00/day (capped at $105.00/mo) |
| Small Supplies (as available) | Cost+20% | Cost+20% | Cost+20% |
| Direct Staff Time | $110.25/hr | $110.25/hr | $110.25/hr |
Notes
- All hourly charges are billed at a half hour minimum per single use, and billed to tenths of hours thereafter.
- OSU Nanotech West capabilities not listed in the above rate schedule incur no usage charges, or may be unavailable to general users.
- User training incurs no equipment charges or staff time charges but does incur cleanroom entrance fees if applicable.
- New users will be charged a $10 fee for key fob and user/account set-up.
- User must supply AFM probe tips. Contact staff for available inventory or part numbers.
- Plus cost of precursor used.
- Contact staff for pricing.
- Contact staff for availability of blades.
- For oxidation and diffusion furnace runs of more than 8 hours contact staff for pricing.
- MICA Tool access applies to tools PRB05, PRB07, PRB08, PRB10, PRB11
- Gold use with EBL01 coat is $9.92/run, with SEM02 coat is $2.48/run