User Fees
| Description | OSU Academic | Non-OSU Academic | Non-Academic |
|---|---|---|---|
| Direct Staff Time | $100.00/hr | $100.00/hr | $100.00/hr |
| Cleanroom Access | $60.00/day ($300.00/month) | $93.60/day ($468.00/month) | $115.00/day ($575.00/month) |
| AFM04 - Veeco Icon 3 AFM | $17.85/hre | $27.85/hre | $35.70/hre |
| ALD01 - Picosun R-150B ALD | $80.00 + Source/runf | $123.20 + Source/runf | $160 + Source/runf |
| ALN01/ALN02/ALN03 - Contact Aligner | $23.10/hr | $36.04/hr | $46.20/hr |
| ASH01 - Diener Pico Oxygen Pla | $10.50/hr | $16.38/hr | $21.00/hr |
| BND01 - EV 520 Bonder | $15.00/hr | $23.40/hr | $28.00/hr |
| BND03 - Wire Bonder | $15.00/hr | $23.40/hr | $40.00/hr |
| BND05 - Ball Bonder | $15.00/hr | $23.40/hr | $40.00/hr |
| COT02,03,04 - Spin Coater | $6.50/hr | $10.14/hr | $13.00/hr |
| CVD01 - Axitron MOCVD | Variesg | Variesg | Variesg |
| CVD02 - Plasma-Therm 790 PECVD | $28.35/hr | $44.23/hr | $56.70/hr |
| CVD03 - Nitride MOCVD | Variesg | Variesg | Variesg |
| CVD04 - GaO and AlGaO MOCVD | Variesg | Variesg | Variesg |
| EBL01 - Tool time | $84.00/hr | $131.04/hr | Quoted |
EBL01 Job Assist | $100.00/hr | $100.00/hr | $100.00/hr |
4" Photomasks | $550.00 | $550.00 | $770.00 |
5" Photomasks/Reticle | $660.00 | $660.00 | $880.00 |
| ETC01 - Technics 800 RIE | $11.00/hr | $17.16/hr | $22.00/hr |
| ETC04 - Plasma-Therm ICP RIE | $35.70/hr | $55.69/hr | $71.40/hr |
| ETC05 - Plasma-Therm ICP DRIE | $35.70/hr | $55.69/hr | $71.40/hr |
| EVP01 - Denton 502A Evaporator | $35.00/hr | $54.60/hr | $70.00/hr |
| EVP03 - CHA Evaporator | $41.00/hr | $63.96/hr | $82.00/hr |
| EVP05 - Denton 502A Evaporator | $35.00/hr | $54.60/hr | $70.00/hr |
| INS09 - Optical Profilometer | $5.00/hr | $7.80/hr | $25.00/hr |
| POL01/02 - Lapper & Polisher | $40.00/use | $62.50/use | $80.00/use |
| PRB05 - Electrical Optical Test Table | $20.00/hr | $31.20/hr | $50.00/hr |
| PRB06 - Unisom Solar Simulator | $10.00/hr | $15.60/hr | $20.00/hr |
| PRB07 - Cryo Probe Station | $10.00/hr | $15.60/hr | $35.00/hr |
| PRB08 - IR QE Measurement | $10.00/hr | $15.60/hr | $35.00/hr |
| PVD01 - Hummer Sputter Tool | $10.50/hr | $16.38/hr | $21.00/hr |
| PVD03 - AJA Sputter Tool | $25.20/hr | $39.31/hr | $50.40/hr |
| RTA01/02 - Rapid Thermal Anneal | $22.05/hr | $34.40/hr | $44.10/hr |
| SAW01 - K&S Dicing Saw | $15.00/hrh | $23.40/hrh | $50.00/hrh |
| SEM01 - Hitachi S-3000 SEM | $20.00/hr | $31.20/hr | $50.00/hr |
| SEM02 - Zeiss Ultra 55 Plus FE | $60.00/hr | $93.60/hr | $175.00/hr |
| STP01 - GCA stepper | $23.10/hr | $36.04/hr | $46.20/hr |
| TUB01 - LP-CVD Polysilicon | $10.00/hr | $15.60/hr | $20.00/hr |
| TUB02 - Nitride Furnace Tube | $45.00/hr | $70.20/hr | $90.00/hr |
| TUB03 - Annealing / Diffusion | $22.00/hr ($110.00/use)i | $34.32/hr ($171.60/use)i | $44.00/hr ($220.00/use)i |
| TUB04 - Oxidation Furnace Tube | $22.00/hr ($110.00/use)i | $34.32/hr ($171.60/use)i | $44.00/hr ($220.00/use)i |
| TUB05 - SSP-354 furnace tube | $10.50/hr | $16.38/hr | $21.00/hr |
| TUB06 - Tube Furnace | $10.00/hr ($40.00/use)i | $15.60/hr ($62.40/use)i | $20.00/hr ($80.00/use)i |
| MICA Lab Access | $50.00/day | $78.00/day | Variesg |
| Small Supplies (as available) | Cost+20% | Cost+20% | Cost+20% |
| Gold, Palladium, and Platinum for evaporation | Cost+20% | Cost+20% | Cost+20% |
Notes
- All hourly charges are billed at a half hour minimum per single use, and billed to tenths of hours thereafter.
- OSU Nanotech West capabilities not listed in the above rate schedule incur no usage charges, or may be unavailable to general users.
- User training incurs no equipment charges or staff time charges but does incur cleanroom entrance fees if applicable.
- New users will be charged a $10 fee for key fob and user/account set-up.
- User must supply AFM probe tips. Contact staff for available inventory or part numbers.
- Plus cost of precursor used.
- Contact staff for pricing.
- Contact staff for availability of blades.
- For oxidation and diffusion furnace runs of more than 8 hours contact staff for pricing.