User Fees
| Description | OSU Academic | Non-OSU Academic | Non-Academic |
|---|---|---|---|
| AFM04 - Veeco Icon 3 AFM | $20.24/hr + AFM tips | $31.57/hr + AFM tips | $40.48/hr + AFM tips |
| ALD01 - Picosun R-150B ALD | $95.26 + Source/run | $148.60 + Source/run | $190.51 + Source/run |
| ALN01/ALN02/ALN03 - Contact Aligner | $27.51/hr | $42.91/hr | $55.02/hr |
| ASH01 - Diener Pico Oxygen Plasma Asher | $12.51/hr | $19.51/hr | $25.01/hr |
| BND03 - Wire Bonder | $17.86/hr | $27.87/hr | $47.63/hr |
| BND04 - Flip Chip Bonder | $56.70/hr | $88.45/hr | $113.40/hr |
| BND05 - Ball Bonder | $17.86/hr | $27.87/hr | $47.63/hr |
| COT02,03,04,05 - Spin Coater | $7.74/hr | $12.08/hr | $15.49/hr |
| CVD01 - Axitron MOCVD | Variesa | Variesa | Variesa |
| CVD02 - Plasma-Therm 790 PECVD | $33.76/hr | $52.67/hr | $67.52/hr |
| CVD03 - Nitride MOCVD | Variesa | Variesa | Variesa |
| CVD04 - GaO and AlGaO MOCVD | Variesa | Variesa | Variesa |
| ENV01 - Environmental Chamber | $5.95/hr | $9.28/hr | $11.90/hr |
| ETC01 - Technics 800 RIE | $13.10/hr | $20.44/hr | $26.20/hr |
| ETC04 - Plasma-Therm ICP RIE | $42.51/hr | $66.31/hr | $85.02/hr |
| ETC05 - Plasma-Therm ICP DRIE | $42.51/hr | $66.31/hr | $85.02/hr |
| ETC06 - PlasmaTherm Takachi ICP-RIE | $42.51/hr | $66.31/hr | $85.02/hr |
| EVP01 - Denton 502A Evaporator | $41.68/hr | $65.02/hr | $83.35/hr |
| EVP03 - CHA Evaporator | $48.82/hr | $76.15/hr | $97.63/hr |
| EVP05 - Denton 502A Evaporator | $41.68/hr | $65.02/hr | $83.35/hr |
| INS09 - Optical Profilometer | $5.95/hr | $9.28/hr | $29.76/hr |
| MLA01 - Heidelberg MLA150 | $27.50/hr | $42.9/hr | $54.99/hr |
| POL01/02 - Lapper & Polisher | $47.63/use | $74.30/use | $95.26/use |
| PRB05 - Electrical Optical Test Table | $15.75/hr | $24.73/hr | $47.25/hr |
| PRB06 - Unisom Solar Simulator | $11.91/hr | $18.58/hr | $23.82/hr |
| PRB07 - Cryo Probe Station | $15.75/hr | $24.73/hr | $47.25/hr |
| PRB08 - IR QE Measurement | $15.75/hr | $24.73/hr | $47.25/hr |
| PRB10 - IR Camera | $262.50/sample | $412.13/sample | $787.50/sample |
| PRB11 - 8D PL and Lifetime Mapping | $15.75/hr | $24.73/hr | $47.25/hr |
| PRB12 - Signatone Room Temperature Probe Station | $5.40/hr | $8.42/hr | $10.80/hr |
| PRT01 - Ultimaker 2+ 3D Printer | $10.80/hr | $16.85/hr | $21.60/hr |
| PVD01 - Hummer Sputter Tool | $12.51/hr | $19.51/hr | $25.01/hr |
| PVD03 - AJA Sputter Tool | $30.00/hr | $46.80/hr | $60.00/hr |
| PVD04 - Cressington 108 Auto/SE Sputter Coater | |||
E-beam sample coat (Au) | $16.96/run | $26.45/run | $33.91/run |
SEM sample coat (Au) | $8.92/run | $13.92/run | $17.84/run |
| RTA02 - Rapid Thermal Anneal | $26.25/hr | $40.96/hr | $52.51/hr |
| SAW02 - ADT 7122 Dicing Saw | $22.68/hra | $35.38/hra | $85.05/hra |
| SEM01 - Hitachi S-3000 SEM | $28.35/hr | $44.23/hr | $62.37/hr |
| SEM02 - Zeiss Ultra 55 Plus FE | $71.44/hr | $111.45/hr | $208.38/hr |
| TUB01 - LP-CVD Polysilicon | $11.91/hra | $18.58/hra | $23.82/hra |
| TUB02 - Nitride Furnace Tube | $53.58/hra | $83.58/hra | $107.16/hra |
| TUB03 - Annealing / Diffusion | $26.20/hra | $40.87/hra | $52.40/hra |
| TUB04 - Oxidation Furnace Tube | $26.20/hra | $40.87/hra | $52.40/hra |
| TUB05 - SSP-354 furnace tube | $12.51/hr | $19.51/hr | $25.01/hr |
| TUB06 - Tube Furnace | $11.91/hr ($47.64/use) | $18.58/hr ($74.32/use) | $23.82/hr ($95.28/use) |
| XRD01 - Bruker D8 XRD | $34.02/hr | $53.07/hr | $68.04/hr |
| Cleanroom Access | $71.44/day ($357.20/month) | $111.45/day ($557.25/month) | $142.88/day ($714.40/month) |
| EIL Lab Access | $56.70/day | $88.45/day | $113.40/day |
| MICA Tool Access | $78.75/useb | $123.90/useb | $236.25/useb |
| OEM Lab Access | $11.34/day ($56.70/mo) | $17.69/day ($88.45/mo) | $22.68/day ($113.40/mo) |
| Small Supplies (as available) | Cost+20% | Cost+20% | Cost+20% |
| Direct Staff Time | $110.00/hr | $110.00/hr | $110.00/hr |
| New User Fob and Set Up | $20.00 | $20.00 | $20.00 |
| User Training | $51.50/hr + access | $51.50/hr + access | $51.50/hr + access |
Notes
- Hourly rates are billed at a half hour minimum per individual use and billed to tenths of hours thereafter.
- Contact staff for assisted tool use, materials compatibility, and/or tool rates not listed.
- MICA tool access applies to tools PRB05, PRB07, PRB08, PRB10, PRB11 and capped at 10 charges per month.