Nanotech West is pleased to announce the new gallium oxide-capable metal-organic chemical vapor deposition (MOCVD) system is now qualified and operational. This MOCVD (tool code CVD04) system was manufactured by Agnitron Technology of Minnesota and is specially designed for GaO and AlGaO epitaxy. CVD04 is capable of depositing on 50mm substrates at temperatures as high as 1050° C. The Institute …
New Installation Brings MOCVD Gallium Oxide Capability to NTW
NTW’s Metalorganic Chemical Vapor Deposition (MOCVD) Lab took delivery of a third MOCVD system on November 28, 2018. The new Agilis R&D MOCVD system manufactured by Agnitron (tool code CVD04) is an RF heated quartz tube system specially designed over the last few years for GaO and AlGaO epitaxy. The new system design, capable of depositing on 50mm substrates at …