Nanotech West is pleased to announce the new gallium oxide-capable metal-organic chemical vapor deposition (MOCVD) system is now qualified and operational. This MOCVD (tool code CVD04) system was manufactured by Agnitron Technology of Minnesota and is specially designed for GaO and AlGaO epitaxy. CVD04 is capable of depositing on 50mm substrates at temperatures as high as 1050° C. The Institute …
NTW makes 2018 EHS Laboratory Safety Dean’s List
Nanotech West is pleased to announce that it has been named to the Laboratory Safety Dean’s List by OSU’s Department of Environmental Health and Safety. NTW, like all labs at OSU, receives an annual site inspection to review physical, chemical and biological safety. Areas of compliance review include staff and user training, documentation including SOPs, updated chemical hygiene plan and …
NTW Enhances Device Packaging Capability with Installation of Ball Bonder
Nanotech West is pleased to announce that a new ball bonder (tool code BND05) is now available for use. The system, a WestBond 7700-E-79 Ball-Wedge Bonder, is located in the Metrology Lab, Room 119. Although the system has both wedge and ball bonding capability, the bonder will be primarily configured to perform ball bonding and compliments the wedge bonding capability …
NTW Cleanroom Adds Thermal Evaporator for Depositing Indium
Nanotech West is pleased to announce that a new thermal evaporator (tool code EVP05) is now available for use in the NTW Cleanroom. The system, located in the labs core space next to Bay 4, is a Denton 502A thermal evaporator (the same layout and chamber design as EVP01) and has a carousel sized to deposit on three 100mm wafers …
MICA Lab Adds New Optical Test Station (PRB08)
Nanotech West is pleased to announced that a new Infrared Single Element Test Station (tool code PRB08) is now available for use in the Mid-Infrared Characterization and Application (MICA) lab (located in Room 117). This flexible setup is capable of a performing a variety of characterization tasks for opto-electronic devices including Dark Current, Spectral Response, and Quantum Efficiency. The backbone …
ICP-RIE System Receives Deep Si (Bosch) Etch Upgrade
Earlier this year NTW acquired and installed a PlasmaTherm 770 ICP-RIE system (tool code ETC05) through collaboration with the AFRL Sensors Directorate at Wright Patterson AFB. Thanks in part to support from the Ohio Sensor and Semiconductor Innovation Platform (OSSIP) program, funded by Ohio Third Frontier and the Ohio Development Services Agency, that system has now been upgraded to provide …
Room 200 Renovation to Install New Nitride MOCVD System Begins
Renovation began this week in NTW’s Metalorganic Chemical Vapor Deposition (MOCVD) Lab located in Room 200 to prepare for the installation of a new dual-chamber Nitride MOCVD system which was moved into NTW on September 21, 2017. The Agilis MOCVD system manufactured by Agnitron has been enabled by Professor Hongping Zhao (ECE), a Materials and Manufacturing for Sustainability (M&Ms) Discovery …
Energy Storage Lab Adds 32 Cubic Foot Environmental Test Chamber
NTW’s new Energy Storage Lab (located in Room 106 on the first floor) has started its’ buildout with the installation of a large environmental testing chamber (ENV01). While the remainder of the lab will continue to be facilitized over the coming months under the direction of Professors Jung Hyun Kim and Vicky Doan-Nguyen, the environmental chamber is now available for …
NTW Lab Management System Adds Cleanroom Displays
NTW’s Lab Management System (or “swipe” system) has been upgraded to include 43″ display monitors in each bay of the cleanroom. The display in each bay contains some schedule details (current, previous and next user) for each tool located in that bay as well as a list of tools currently in use throughout the rest of the cleanroom. Some displays …
MICA Lab Adds Low Temperature Probe Station
NTW’s Mid-Infrared Characterization and Application (MICA) lab (located in Room 117) continues its buildout with the addition of a Lakeshore CRX6.5k cryogenic probe station (tool code PRB07) to provide low temperature device probing capability. Cooled by a closed cycle helium compressor the probe station supports measurements between 6.5K and 350K. The system is configured with four Triax probe arms and …
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