New NTW User Rates Effective July 1, 2018

The following is a list of rates that will go in effect on July 1, 2018.

Description OSU Academic Non-OSU Aademic Non-Academic
Direct Staff Time $100.00 $100.00 $100.00
Cleanroom Access $60.00 $93.60 $115.00
MICA Lab Access $50.00 $78.00 $100.00
ALN01/ALN02/ALN03 $23.10 $36.04 $46.20
BND01 – EV 520 Bonder $15.00 $23.40 $28.00
EVP01 – Denton 502A Evaporator $35.00 $54.60 $70.00
ETC01 – Technics 800 RIE $11.00 $17.16 $22.00
TUB04 – Oxidation Furnace Tube $22.00 $34.32 $44.00
TUB03 – Annealing / Diffusion $22.00 $34.32 $44.00
TUB02 – Nitride Furnace Tube $45.00 $70.20 $90.00
TUB01 – LP-CVD Polysilicon $10.00 $15.60 $20.00
PVD03 – AJA Sputter Tool $25.20 $39.31 $50.40
RTA01/02-Rapid Thermal Anneal $22.05 $34.40 $44.10
BND03 – Wire Bonder $15.00 $23.40 $40.00
BND05 – Ball Bonder $15.00 $23.40 $40.00
ALD01 – Picosun R-150B ALD TBD TBD TBD
SEM02 – Zeiss Ultra 55 Plus FE $60.00 $93.60 $175.00
ETC04 – Plasma-Therm ICP RIE $35.70 $55.69 $71.40
EVP03 – CHA Evaporator $41.00 $63.96 $82.00
STP01 – GCA stepper $23.10 $36.04 $46.20
ASH01 – Diener Pico Oxygen Pla $10.50 $16.38 $21.00
CVD02 – Plasma-Therm 790 PECVD $28.35 $44.23 $56.70
COT02 – Spin Coater $6.50 $10.14 $13.00
COT03 – Spin Coater/Hot plate $6.50 $10.14 $13.00
TUB06 – Tube Furnace $10.00 $15.60 $20.00
INS09 – Optical Profilometer $5.00 $7.80 $25.00
SEM01 – Hitachi S-3000 SEM $20.00 $31.20 $50.00
AFM04 – Veeco Icon 3 AFM $17.85 $27.85 $35.70
SAW01 – K&S Dicing Saw $15.00 $23.40 $50.00
TUB05 – SSP-354 furnace tube $10.50 $16.38 $21.00
PVD01 – Hummer Sputter Tool $10.50 $16.38 $21.00
POL01/02 Lapper & Polisher $10.00 $15.60 $35.00
PRB06 – Unisom Solar Simulator $10.00 $15.60 $20.00
PRB05 – Electrical Optical Test Table $20.00 $31.20 $50.00
PRB07 – Cryo Probe Station $10.00 $15.60 $35.00
PRB08 – IR QE Measurement $10.00 $15.60 $35.00
EBL01 – Tool time $84.00 $131.04 Quoted
EBL01 Job Assist $100.00 $100.00 $100.00
4″ Photomasks $550.00 $550.00 $770.00
5″ Photomasks $660.00 $660.00 $880.00
5″ Reticle $660.00 $660.00 $880.00