The following is a list of rates that will go in effect on July 1, 2018.
| Description | OSU Academic | Non-OSU Aademic | Non-Academic |
|---|---|---|---|
| Direct Staff Time | $100.00 | $100.00 | $100.00 |
| Cleanroom Access | $60.00 | $93.60 | $115.00 |
| MICA Lab Access | $50.00 | $78.00 | $100.00 |
| ALN01/ALN02/ALN03 | $23.10 | $36.04 | $46.20 |
| BND01 – EV 520 Bonder | $15.00 | $23.40 | $28.00 |
| EVP01 – Denton 502A Evaporator | $35.00 | $54.60 | $70.00 |
| ETC01 – Technics 800 RIE | $11.00 | $17.16 | $22.00 |
| TUB04 – Oxidation Furnace Tube | $22.00 | $34.32 | $44.00 |
| TUB03 – Annealing / Diffusion | $22.00 | $34.32 | $44.00 |
| TUB02 – Nitride Furnace Tube | $45.00 | $70.20 | $90.00 |
| TUB01 – LP-CVD Polysilicon | $10.00 | $15.60 | $20.00 |
| PVD03 – AJA Sputter Tool | $25.20 | $39.31 | $50.40 |
| RTA01/02-Rapid Thermal Anneal | $22.05 | $34.40 | $44.10 |
| BND03 – Wire Bonder | $15.00 | $23.40 | $40.00 |
| BND05 – Ball Bonder | $15.00 | $23.40 | $40.00 |
| ALD01 – Picosun R-150B ALD | TBD | TBD | TBD |
| SEM02 – Zeiss Ultra 55 Plus FE | $60.00 | $93.60 | $175.00 |
| ETC04 – Plasma-Therm ICP RIE | $35.70 | $55.69 | $71.40 |
| EVP03 – CHA Evaporator | $41.00 | $63.96 | $82.00 |
| STP01 – GCA stepper | $23.10 | $36.04 | $46.20 |
| ASH01 – Diener Pico Oxygen Pla | $10.50 | $16.38 | $21.00 |
| CVD02 – Plasma-Therm 790 PECVD | $28.35 | $44.23 | $56.70 |
| COT02 – Spin Coater | $6.50 | $10.14 | $13.00 |
| COT03 – Spin Coater/Hot plate | $6.50 | $10.14 | $13.00 |
| TUB06 – Tube Furnace | $10.00 | $15.60 | $20.00 |
| INS09 – Optical Profilometer | $5.00 | $7.80 | $25.00 |
| SEM01 – Hitachi S-3000 SEM | $20.00 | $31.20 | $50.00 |
| AFM04 – Veeco Icon 3 AFM | $17.85 | $27.85 | $35.70 |
| SAW01 – K&S Dicing Saw | $15.00 | $23.40 | $50.00 |
| TUB05 – SSP-354 furnace tube | $10.50 | $16.38 | $21.00 |
| PVD01 – Hummer Sputter Tool | $10.50 | $16.38 | $21.00 |
| POL01/02 Lapper & Polisher | $10.00 | $15.60 | $35.00 |
| PRB06 – Unisom Solar Simulator | $10.00 | $15.60 | $20.00 |
| PRB05 – Electrical Optical Test Table | $20.00 | $31.20 | $50.00 |
| PRB07 – Cryo Probe Station | $10.00 | $15.60 | $35.00 |
| PRB08 – IR QE Measurement | $10.00 | $15.60 | $35.00 |
| EBL01 – Tool time | $84.00 | $131.04 | Quoted |
| EBL01 Job Assist | $100.00 | $100.00 | $100.00 |
| 4″ Photomasks | $550.00 | $550.00 | $770.00 |
| 5″ Photomasks | $660.00 | $660.00 | $880.00 |
| 5″ Reticle | $660.00 | $660.00 | $880.00 |