User Fees

DescriptionOSU AcademicNon-OSU AcademicNon-Academic
AFM04 - Veeco Icon 3 AFM$20.24/hr + AFM tips$33.47/hr + AFM tips$42.50/hr + AFM tips
ALD01 - Picosun R-150B ALD$100.02 + Source/run$157.54 + Source/run$200.05 + Source/run
ALN02/ALN03 - Contact Aligner$28.89/hr$45.49/hr$57.77/hr
ASH01 - Diener Pico Oxygen Plasma Asher$13.14/hr20.69/hr26.27/hr
BMR01 - GenISYS Beamer & Tracer Software$25.00/hr$25.00/hr$25.00/hr
BND03 - Wire Bonder18.75/hr29.54/hr50.01/hr
BND04 - Flip Chip Bonder59.54/hr$93.77/hr$119.07/hr
BND05 - Ball Bonder$17.86/hr$29.54/hr$50.01/hr
COT02,03,04,05 - Spin Coater$8.13/hr$12.80/hr$16.26/hr
CVD01 - Axitron MOCVDVariesaVariesaVariesa
CVD02 - Plasma-Therm 790 PECVD$35.45/hr$55.83/hr$70.90/hr
CVD03 - Nitride MOCVDVariesaVariesaVariesa
CVD04 - GaO and AlGaO MOCVDVariesaVariesaVariesa
EBL02 - Raith EBPG 5150$150.00/hrc$236.25/hrc$450.00/hrc
ENV01 - Environmental Chamber$5.95/hr$9.84/hr$12.50/hr
ETC01 - Technics 800 RIE$13.76/hr$21.66/hr$27.51/hr
ETC04 - Plasma-Therm ICP RIE$44.64/hr$70.60/hr$89.28/hr
ETC05 - Plasma-Therm ICP DRIE$44.64/hr$70.60/hr$89.28/hr
ETC06 - PlasmaTherm Takachi ICP-RIE$44.64/hr$70.60/hr$89.28/hr
EVP01 - Denton 502A Evaporator$43.76/hr$68.93/hr$87.53/hr
EVP03 - CHA Evaporator$51.26/hr$80.74/hr$102.52/hr
EVP05 - Denton 502A Evaporator$43.76/hr$68.93/hr$87.53/hr
INS09 - Optical Profilometer$6.25/hr$9.84/hr$31.25/hr
MLA01 - Heidelberg MLA150$28.88/hr$45.48/hr$57.75/hr
POL01/02 - Lapper & Polisher$47.63/use$78.77/hr$100.02/hr
PRB05 - Electrical Optical Test Table$15.75/hr$26.05/hr$49.61/hr
PRB06 - Unisom Solar Simulator$11.91/hr$19.70/hr$25.01/hr
PRB07 - Cryo Probe Station$15.75/hr$26.05/hr$49.61/hr
PRB08 - IR QE Measurement$15.75/hr$26.05/hr$49.61/hr
PRB10 - IR Camera$262.50/sample$434.11/sample$826.88/sample
PRB11 - 8D PL and Lifetime Mapping$15.75/hr$26.05/hr$49.61/hr
PRB12 - Signatone Room Temperature Probe Station$5.40/hr$8.42/hr$10.80/hr
PRT01 - Ultimaker 2+ 3D Printer$10.80/hr$16.85/hr$21.60/hr
PVD01 - Hummer Sputter Tool$12.51/hr$20.69/hr$26.27/hr
PVD03 - AJA Sputter Tool$31.50/hr$49.61/hr$63.00/hr
PVD04 - Cressington 108 Auto/SE Sputter Coater
E-beam sample coat (Au)
$17.81/run$28.05/run$35.62/run
SEM sample coat (Au)
$9.37/run$14.75/run$28.05/run
RTA02 - Rapid Thermal Anneal$27.56/hr$43.41/hr$55.13/hr
SAW02 - ADT 7122 Dicing Saw$23.81/hra$37.51/hra$89.30/hra
SEM01 - Hitachi S-3000 SEM$28.35/hr$46.88/hr$65.49/hr
SEM02 - Zeiss Ultra 55 Plus FE$75.01/hr$118.14/hr$218.74/hr
TUB01 - LP-CVD Polysilicon$12.51/hra$19.70/hra$25.01/hra
TUB02 - Nitride Furnace Tube$56.26/hra$88.61/hra$112.52/hra
TUB03 - Annealing / Diffusion$27.51/hra$43.33/hra$55.02/hra
TUB04 - Oxidation Furnace Tube$27.51/hra$43.33/hra$55.05/hra
TUB05 - SSP-354 furnace tube$12.51/hr$20.69/hr$26.27/hr
TUB06 - Tube Furnace$12.51/hr ($50.04/use)$19.70/hr ($77.60/use)$25.01/hr ($100.04/use)
XFR01 - Microtransfer Printer$42/hr$66.15/hr$100/hr
XRD01 - Bruker D8 XRD$34.02/hr$56.26/hr$71.44/hr
Cleanroom Access$75.01/day ($375.05/month)$118.14/day ($590.70/month)$150.02/day ($750.10/month)
CVD Lab Access
For CVD01 use
$85.05/day$132.68/day$226.80/day
For CVD03/04 use
$56.70/day$87.32/day$113.40/day
EIL Lab Access$56.70/day$93.77/day$119.07/day
Furnace
$7.50/hr$11.70/hr$15.00/hr
ARE-310 Mixer
$50.00/run$78.00/run$100.00/run
Coating
$100.00/hr$156.00/hr$200.00/hr
Calendering
$100.00/hr$156.00/hr$200.00/hr
Coin Cell Fabrication
$100.00/hr$156.00/hr$200.00/hr
Pouch Cell Assembly
$100.00/hr$156.00/hr$200.00/hr
MICA Tool Access$78.75/useb$130.23/useb$248.06/useb
OEM Lab Access$11.34/day ($56.70/month)$18.75/day ($93.75/month)$23.81/day ($119.05/month)
Small Supplies (as available)Cost+20%Cost+20%Cost+20%
Direct Staff Time$115/hr$115/hr$115/hr
New User Fob and Set Up$20.00$20.00$20.00
User Training$54.08/hr + access$54.08/hr + access$54.08/hr + access

Notes

  • Unless otherwise stated, hourly rates are billed at a half (0.5) hour minimum per individual use and billed to tenths of hours thereafter.
  1. Contact staff for assisted tool use, materials compatibility, and/or tool rates not listed.
  2. MICA tool access applies to tools PRB05, PRB07, PRB08, PRB10, PRB11 and capped at 10 charges per month.
  3. Billed at one (1) hour minimum per individual use.