Cleanroom

  Academic UsersNon-OSU Academic UsersNon-Academic Users
AmountCapAmountCapAmountCap
Entrance Fee (per user) $55/day $275/month $84.70/day $423.50/month $110/day $550/month

Equipment Charges

EV 620 Contact Aligners (ALN01, ALN02) $22/hour   $33.88/hour   $44/hour  
GCA stepper (STP01) $22/hour   $33.88/hour   $44/hour  
EV 520 Bonder (BND01) $13.50/hour   $20.79/hour   $27/hour  
Zeiss Ultra 55 Plus FE-SEM (SEM02) $49/hour   $75.46/hour   $150/hour  
Picosun R-150B ALD (ALD01) $80/rune   $123.20/rune   $160/rune  
Denton 502A Evaporator (EVP01) $34/hour   $52.36/hour   $68/hour  
CHA Evaporator (EVP03) $39/hour   $60.06/hour   $78/hour  
Technics 800 Reactive Ion Etcher (ETC01) $10.50/hour   $16.17/hour   $21/hour  
Plasma-Therm 790 PECVD (CVD02) $27/hour   $41.58/hour   $54/hour  
Oxidation Furnace Tube (TUB04) $22/hour $110/usef $33.88/hour $169.40/usef $44/hour $220/usef
Annealing / Diffusion Furnace Tube (TUB03) $22/hour $110/usef $33.88/hour $169.40/usef $44/hour $220/usef
LP-CVD Nitride Furnace Tube (TUB02) $45/hour   $69.30/hour   $90/hour  
N2 Annealing/Baking Furnace Tube (TUB01) $10/hour   $15.40/hour   $20/hour  
Wire Bonder (BND03) $17/hour   $26.18/hour   $34/hour  
Rapid Thermal Anneal (RTA01) $21/hour   $32.34/hour   $42/hour  
Plasma-Therm ICP RIE (ETC04) $34/hour   $52.36/hour   $68/hour  
AJA Sputter Tool (PVD03) $24/hour   $36.96/hour   $48/hour  
Diener Pico Oxygen Plasma Asher (ASH01) $10/hour   $15.40/hour   $20/hour  
CE 100CB Resist Coater / Hot Plate (COT03) $6/hour   $9.24/hour   $12/hour  
Laurell Polymer Spin Coater (COT02) $5/hour   $7.70/hour   $10/hour  
Across International 150mm Furnace Tube (TUB06) $10/hour   $15.40/hour   $20/hour  
NanoScience Zeta-20 3D Optical Profilometer (INS09) $10/hour   $15.40/hour   $30/hour  

E-Beam Lithography Equipment Charges

Tool Time $80/hour   $123.30/hour   Pricing on Request  
New Job Setup $110/job   $169.40/job   $220/job  
4" Photomasks $525 each   $735 each   $735 each  
5" Photomasks / Reticles $630 each   $840 each   $840 each  
Job Assist - unaligned $70 each   $70 each   $70 each  
Job Assist - aligned $140 each   $140 each   $140 each  

Biohybrid Laboratory

  Academic UsersNon-OSU Academic UsersNon-Academic Users
AmountCapAmountCapAmountCap
Reserved Lab Bench Pricing upon request   Pricing upon request   Pricing upon request  
Hitachi S-3000 SEM (SEM01) $17/hour   $26.18/hour   $34/hour  
Hummer VI Tabletop Sputter Coater (PVD01) $10/hour   $15.40/hour   $20/hour  

Other Charges

  Academic UsersNon-OSU Academic UsersNon-Academic Users
AmountCapAmountCapAmountCap
Direct Staff Contract Time (as available) $95/hour   $95/hour   $95/hour  
Aixtron MOCVD (CVD01) Variesg   Variesg   Variesg  
K&S 7100ad Dicing Saw (SAW01) Variesh   Variesh   Variesh  
Bruker Icon 3 AFM (AFM04) $17/houri   $26.18/houri   $34/houri  
Innovations SSP-354 Furnace Tube (TUB05) $10/hour   $15.40/hour   $20/hour  
Small Supplies (as available) Cost+20%   Cost+20%   Cost+20%  
Gold, Palladium, and Platinum for evaporation Cost+20%   Cost+20%   Cost+20%  
Notes:
  1. All hourly charges are billed at a half hour minimum per single use, and billed to tenths of hours thereafter.
  2. OSU Nanotech West capabilities not listed in the above rate schedule incur no usage charges, or may be unavailable to general users.
  3. User training incurs no equipment charges or staff time charges but does incur cleanroom entrance fees if applicable.
  4. New users will be charged a $10 fee for key fob and user/account set-up.
  5. ALD depositions <25nm in thickness. For thicker depositions contact staff for pricing.
  6. For oxidation and diffusion furnace runs of more than 8 hours contact staff for pricing.
  7. MOCVD Epitaxy rates are structure dependent. Contact staff for pricing.
  8. Contact staff for pricing and availability of blades.
  9. User must supply AFM probe tips. Contact staff for available inventory or part numbers.