User Fees

DescriptionOSU AcademicNon-OSU AcademicNon-Academic
AFM04 - Veeco Icon 3 AFM$20.24/hr + AFM tips$31.57/hr + AFM tips$40.48/hr + AFM tips
ALD01 - Picosun R-150B ALD$95.26 + Source/run$148.60 + Source/run$190.51 + Source/run
ALN02/ALN03 - Contact Aligner$27.51/hr$42.91/hr$55.02/hr
ASH01 - Diener Pico Oxygen Plasma Asher$12.51/hr$19.51/hr$25.01/hr
BND03 - Wire Bonder$17.86/hr$27.87/hr$47.63/hr
BND04 - Flip Chip Bonder$56.70/hr$88.45/hr$113.40/hr
BND05 - Ball Bonder$17.86/hr$27.87/hr$47.63/hr
COT02,03,04,05 - Spin Coater$7.74/hr$12.08/hr$15.49/hr
CVD01 - Axitron MOCVDVariesaVariesaVariesa
CVD02 - Plasma-Therm 790 PECVD$33.76/hr$52.67/hr$67.52/hr
CVD03 - Nitride MOCVDVariesaVariesaVariesa
CVD04 - GaO and AlGaO MOCVDVariesaVariesaVariesa
ENV01 - Environmental Chamber$5.95/hr$9.28/hr$11.90/hr
ETC01 - Technics 800 RIE$13.10/hr$20.44/hr$26.20/hr
ETC04 - Plasma-Therm ICP RIE$42.51/hr$66.31/hr$85.02/hr
ETC05 - Plasma-Therm ICP DRIE$42.51/hr$66.31/hr$85.02/hr
ETC06 - PlasmaTherm Takachi ICP-RIE$42.51/hr$66.31/hr$85.02/hr
EVP01 - Denton 502A Evaporator$41.68/hr$65.02/hr$83.35/hr
EVP03 - CHA Evaporator$48.82/hr$76.15/hr$97.63/hr
EVP05 - Denton 502A Evaporator$41.68/hr$65.02/hr$83.35/hr
INS09 - Optical Profilometer$5.95/hr$9.28/hr$29.76/hr
MLA01 - Heidelberg MLA150$27.50/hr$42.9/hr$54.99/hr
POL01/02 - Lapper & Polisher$47.63/use$74.30/use$95.26/use
PRB05 - Electrical Optical Test Table$15.75/hr$24.73/hr$47.25/hr
PRB06 - Unisom Solar Simulator$11.91/hr$18.58/hr$23.82/hr
PRB07 - Cryo Probe Station$15.75/hr$24.73/hr$47.25/hr
PRB08 - IR QE Measurement$15.75/hr$24.73/hr$47.25/hr
PRB10 - IR Camera$262.50/sample$412.13/sample$787.50/sample
PRB11 - 8D PL and Lifetime Mapping$15.75/hr$24.73/hr$47.25/hr
PRB12 - Signatone Room Temperature Probe Station$5.40/hr$8.42/hr$10.80/hr
PRT01 - Ultimaker 2+ 3D Printer$10.80/hr$16.85/hr$21.60/hr
PVD01 - Hummer Sputter Tool$12.51/hr$19.51/hr$25.01/hr
PVD03 - AJA Sputter Tool$30.00/hr$46.80/hr$60.00/hr
PVD04 - Cressington 108 Auto/SE Sputter Coater
E-beam sample coat (Au)
$16.96/run$26.45/run$33.91/run
SEM sample coat (Au)
$8.92/run$13.92/run$17.84/run
RTA02 - Rapid Thermal Anneal$26.25/hr$40.96/hr$52.51/hr
SAW02 - ADT 7122 Dicing Saw$22.68/hra$35.38/hra$85.05/hra
SEM01 - Hitachi S-3000 SEM$28.35/hr$44.23/hr$62.37/hr
SEM02 - Zeiss Ultra 55 Plus FE$71.44/hr$111.45/hr$208.38/hr
TUB01 - LP-CVD Polysilicon$11.91/hra$18.58/hra$23.82/hra
TUB02 - Nitride Furnace Tube$53.58/hra$83.58/hra$107.16/hra
TUB03 - Annealing / Diffusion$26.20/hra$40.87/hra$52.40/hra
TUB04 - Oxidation Furnace Tube$26.20/hra$40.87/hra$52.40/hra
TUB05 - SSP-354 furnace tube$12.51/hr$19.51/hr$25.01/hr
TUB06 - Tube Furnace$11.91/hr ($47.64/use)$18.58/hr ($74.32/use)$23.82/hr ($95.28/use)
XFR01 - Microtransfer Printer$40/hr$63/hr$100/hr
XRD01 - Bruker D8 XRD$34.02/hr$53.07/hr$68.04/hr
Cleanroom Access$71.44/day ($357.20/month)$111.45/day ($557.25/month)$142.88/day ($714.40/month)
EIL Lab Access$56.70/day$88.45/day$113.40/day
MICA Tool Access$78.75/useb$123.90/useb$236.25/useb
OEM Lab Access$11.34/day ($56.70/mo)$17.69/day ($88.45/mo)$22.68/day ($113.40/mo)
Small Supplies (as available)Cost+20%Cost+20%Cost+20%
Direct Staff Time$110.00/hr$110.00/hr$110.00/hr
New User Fob and Set Up$20.00$20.00$20.00
User Training$51.50/hr + access$51.50/hr + access$51.50/hr + access

Notes

  • Hourly rates are billed at a half hour minimum per individual use and billed to tenths of hours thereafter.
  1. Contact staff for assisted tool use, materials compatibility, and/or tool rates not listed.
  2. MICA tool access applies to tools PRB05, PRB07, PRB08, PRB10, PRB11 and capped at 10 charges per month.