EquipmentPrimarySecondarySuper User
AFM04

Bruker Icon 3 AFM

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ALD01

Picosun SUNALE R-150B Atomic Layer Deposition Tool

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ALN01

EV Group 620 Contact Aligner

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ALN02

EV Group 620 Advanced Contact Aligner

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ALN03

Karl Suss MJB-3 Contact Aligner

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ASH01

Diener Pico Oxygen Plasma Asher

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BND01

EV Group 520HE Hot Embosser / Wafer Bonder

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BND03

K&S 4123 Wedge Wire Bonder

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COT02

Laurell Polymer Spin Coater

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COT03

CE 100CB Resist Coater / Hot Plate

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CVD01

Aixtron CCS MOCVD

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CVD02

Plasma Therm 790 PECVD

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EBL01

Vistec EBPG5000 Electron Beam Lithography System

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EDS01

EDAX X-Ray Analysis (SEM01)

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EDS02

Oxford EDS SDD (SEM02)

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ELP03

Woollam alpha-SE Spectroscopic Ellipsometer

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ETC01

Technics Benchtop RIE

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ETC04

Plasma Therm SLR770 ICP RIE

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EVP01

Denton DV-502A E-Gun Evaporator

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EVP03

CHA Solution System E-Gun Evaporator

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EVP04

Cooke Thermal Evaporator

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HOD07

Wet Bench

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HOD08

Wet Bench

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HOD09

Wet Bench

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HOD10

Reynolds Tech Solvent Fume Hood

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HOD11

Reynolds Tech Solvent Fume Hood

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INS01

Leitz Ergolux AMC Optical Microscope

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INS02

Bausch and Lomb Stereozoom 7 Microscope

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INS04

Olympus BX51TRF Optical Microscope

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INS05

Nikon IC-66 Optical Microscope

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INS06

Nikon IC-66 Optical Microscope

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INS07

Leitz Stereozoom Microscope with Digitized Stage

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INS09

NanoScience Zeta-20 3D Optical Profilometer

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NMX01

Nanospec 3000PH Thin Film Reflectometer

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OVN01

BlueM Resist Bake Oven

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OVN02

BlueM Resist Bake Oven

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OVN03

YES III HMDS Vapor Prime / Vacuum Oven

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POL01

Logitech PM4 Lapper

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POL02

Logitech PM5 Polisher

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PRB01

Suss PM5 Electrical Probe Station

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PRB02

Solar Simulator L-I-V Probe Station

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PRB03

Sinton WCT-120 Photoconductance Decay Prober

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PRB04

Jandel MHP/RM3 Four-Point Prober

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PRB06

TS Space Systems Unisim Solar Simulator

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PRB07

Lakeshore CRX-6.5k with Keysight B1500A Parameter Analyzer

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PRB08

IR Quantum Efficiency Measurement System

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PRF01

DekTak3 Profilometer

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PVD01

Hummer VI Tabletop Sputter Coater

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PVD03

AJA Orion RF/DC Sputter Deposition Tool

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RTA01

AGA 410 Rapid Thermal Annealer

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RTA02

AGA 610 Rapid Thermal Annealer

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SAT01

Semitool Hydro3 Wafer Cleaning Tool

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SAW01

K&S 7100 Precision Dicing Saw

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SEM01

Hitachi S-3000H Scanning Electron Microscope

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SEM02

Zeiss Ultra 55 Plus FE-SEM

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STP01

GCA 6100C Stepper (I-line)

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TUB01

N2 Anneal/Bake, Tube 1

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TUB02

LPCVD Silicon Nitride, Tube 2

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TUB03

Boron Diffusion and Anneal, Tube 3

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TUB04

Thermal Oxide, Tube 4

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TUB05

Nanotech Innovations SSP-354 Furnace Tube

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TUB06

Across International 150mm Furnace Tube

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