The metrology and materials analysis capabilities at Nanotech West include:

  • Carl Zeiss Ultra 55 Plus field-emission scanning electron microscope capable of high resolution on conductive and insulating substrates (SEM02)
  • Hitachi S-3000 scanning electron microscope (SEM01)
  • Extensive optical microscopy and photomicroscopy capabilities
  • Electrical probe stations including two light sources for solar simulation
  • Woollam alphaSE spectroscopic ellipsometer (ELP03)
  • Thin film reflectometry (NMX01)
  • Veeco Dektak3 surface profilometry (PRF01)
  • Jandel Four-point probe (PRB04)
  • Sinton WCT-120 photoconductance lifetime tester (PRB03)
  • Bruker Icon 3 Atomic force microscopy (AFM04)
  • Energy Dispersive X-Ray Spectroscopy (EDAX on SEM01 EDS01, Oxford EDS SDD on SEM02 EDS02)
  • Registration measurements of up to 120mm in both X and Y using electron beam (EBL01) and optical methods