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OSU Nanotech West »  Installation of ICP-RIE progressing

User Fees

Cleanroom
 Academic UsersNon-Academic Users
AmountCapAmountCap
Entrance Fee (per user)$42/day$210/month$84/day$420/month
Equipment Charges
EV 620 Contact Aligners$18/hour $36/hour 
EV 520 Bonder$12/hour $24/hour 
Zeiss Ultra 55 Plus FE-SEM $45/hour   $160/hour  
Picosun R-150B ALD $180/rund   $360/rund  
Denton 502A Evaporator$28/hour$84/use$56/hour$168/use
Technics 800 Reactive Ion Etcher$10/hour $20/hour 
Lam 490 Etcher$22/hour $44/hour 
Lam 490 Etcher$22/hour $44/hour 
Oxidation Furnace Tube$12/hour $60/use e $24/hour$120/use e
Annealing / Diffusion Furnace Tube$12/hour$60/use e $24/hour$120/use e
LP-CVD Nitride Furnace Tube$40/hour $80/hour 
LP-CVD Polysilicon Furnace Tube$40/hour $80/hour 
Olympus Fluorescence Unit$10/hour $20/hour 
Wire Bonder $15/hour   $30/hour  
Rapid Thermal Anneal$20/hour $40/hour 
E-Beam Lithography Equipment Charges
Tool Time$120/hour $750/hour 
New Job Setup$100/job $200/job 
4" Photomasks$600/mask $800/mask 
5" Photomasks$700/mask $900/mask 


Biohybrid Laboratory
 Academic UsersNon-Academic Users
AmountCapAmountCap
Reserved Lab Bench N/A   $170/month  
Veeco Atomic Force Microscope$12/hour$36/use$24/hour$72/use
Asylum Bio AFM$12/hour$36/use$24/hour$72/use
Hitachi S-3000 SEM$12/hour $24/hour 
NanoInk Dip-Pen Nanolithography$12/hour $24/hour 
Dynamic Light Scattering$15/hour $30/hour 


Other Charges
 Amount
Direct Staff Contract Time$80/hour
Small Supplies (as available)Cost+20%/each
Platinum and Gold for evaporationCost+20%



Notes:
  1. All hourly charges are billed at a half hour minimum per single use, and billed to tenths of hours thereafter.
  2. OSU Nanotech West capabilities not listed in the above rate schedule incur no usage charges.
  3. User training incurs no equipment charges or staff time charges but does incur cleanroom entrance fees if applicable.
  4. ALD depositions up to 100 nm in thickness. For thicker depositions contact staff for pricing.
  5. For oxidation and diffusion furnace runs of more than 8 hours contact staff for pricing.