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OSU Nanotech West »  New sputter deposition tool makes first runs

Equipment Status

Name Notes Status Updated
ALN01-Aligner 1 Still has lamp or lamp PS problem. Please use ALN02. Down 11/13/2009
ETC01-Benchtop RIE Power supply is out for repair. Vendor is making progress but no EUT estimate is available at this time. Down 11/13/2009
PRB01-Electronic Probe Station Only 3 of the 4 probes will be available on the system until Monday 11/23/09. Partially Operational 11/18/2009
EVP01-Evaporator Vacuum gauge contaminated and needs to be cleaned (waiting for parts). Gauge is working now but may give intermittent high or low reading. Please call Paul Steffen at 614.595.0650 if reading is unexpectedly high or low. Partially Operational 11/13/2009
TUB02-LPCVD Silicon Nitride, Tube 2 Vacuum pump returned to Polysilicon tube. Waiting for quotations for new pump. Down 11/12/2009
ETC03-Plasma Etcher Oxide The process vacuum pump is being shared with ETC02. while one pump is out for rebuild. Contact Derek Ditmer if you want to use it. Down 11/16/2009