| Name |
Notes |
Status |
Updated |
| ALN01-Aligner 1 |
Still has lamp problem. Please use ALN02. |
Down |
9/29/2009 |
| ETC01-Benchtop RIE |
Power supply needs to be sent out for evaluation and repair. No EUT available at this point. |
Down |
9/29/2009 |
| EVP01-Evaporator |
Vacuum gauge contaminated and needs to be cleaned (waiting for parts). Gauge working now but may give intermittent high or low reading. Please call Paul Steffen at 614.595.0650 if reading is unexpectedly high or low. |
Partially Operational |
10/23/2009 |
| TUB01-LPCVD Polysilicon, Tube 1 |
Pump sent for rebuild cannot be repaired because parts needed are obsolete. Developing replacement plan. Two temperature controllers have also failed and must be repaired/replaced. |
Down |
9/29/2009 |
| ETC03-Plasma Etcher Oxide |
The process vacuum pump is being shared with ETC02. while one pump is out for rebuild. |
Down |
11/3/2009 |
| ETC02-Plasma Etcher Poly/Nitride |
The process vacuum pump is being shared with ETC03 while one pump is out for rebuild. |
Down |
10/27/2009 |
| EBL01-Vistec EBPG 5000 electron beam lithography system |
Tool still down. IGP4 was bad after column clean. Vistec sent wrong pump. New pump arrived 10/26.
Also now awaiting new PVP, which went bad on Frirday 10/23 |
Down |
10/26/2009 |
