| Name |
Notes |
Status |
Updated |
| ALN01-Aligner 1 |
Still has lamp or lamp PS problem. Please use ALN02. |
Down |
11/13/2009 |
| ETC01-Benchtop RIE |
Power supply is out for repair. Vendor is making progress but no EUT estimate is available at this time. |
Down |
11/13/2009 |
| PRB01-Electronic Probe Station |
Only 3 of the 4 probes will be available on the system until Monday 11/23/09. |
Partially Operational |
11/18/2009 |
| EVP01-Evaporator |
Vacuum gauge contaminated and needs to be cleaned (waiting for parts). Gauge is working now but may give intermittent high or low reading. Please call Paul Steffen at 614.595.0650 if reading is unexpectedly high or low. |
Partially Operational |
11/13/2009 |
| TUB02-LPCVD Silicon Nitride, Tube 2 |
Vacuum pump returned to Polysilicon tube. Waiting for quotations for new pump. |
Down |
11/12/2009 |
| ETC03-Plasma Etcher Oxide |
The process vacuum pump is being shared with ETC02. while one pump is out for rebuild. Contact Derek Ditmer if you want to use it. |
Down |
11/16/2009 |
