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OSU Nanotech West »  MOCVD makes first runs

Equipment Status

Name Notes Status Updated
ALN01-Aligner 1 Still has lamp problem. Please use ALN02. Down 9/29/2009
ETC01-Benchtop RIE Power supply needs to be sent out for evaluation and repair. No EUT available at this point. Down 9/29/2009
EVP01-Evaporator Vacuum gauge contaminated and needs to be cleaned (waiting for parts). Gauge working now but may give intermittent high or low reading. Please call Paul Steffen at 614.595.0650 if reading is unexpectedly high or low. Partially Operational 10/23/2009
TUB01-LPCVD Polysilicon, Tube 1 Pump sent for rebuild cannot be repaired because parts needed are obsolete. Developing replacement plan. Two temperature controllers have also failed and must be repaired/replaced. Down 9/29/2009
ETC03-Plasma Etcher Oxide The process vacuum pump is being shared with ETC02. while one pump is out for rebuild. Down 11/3/2009
ETC02-Plasma Etcher Poly/Nitride The process vacuum pump is being shared with ETC03 while one pump is out for rebuild. Down 10/27/2009
EBL01-Vistec EBPG 5000 electron beam lithography system Tool still down. IGP4 was bad after column clean. Vistec sent wrong pump. New pump arrived 10/26. Also now awaiting new PVP, which went bad on Frirday 10/23 Down 10/26/2009