| Name |
Notes |
Status |
Updated |
| ALN01-Aligner 1 |
Still has lamp problem. Please use ALN02 instead. |
Down |
6/2/2009 |
| BND01-Hot Embosser/Bonder |
Communication error with computer. |
Down |
6/19/2009 |
| TUB01-LPCVD Polysilicon, Tube 1 |
Fixed cooling water leak in vacuum pump and using on TUB02 Silicon Nitride. Pump from TUB02 will be sent for rebuild with return expected by July 10. Two temperature controllers failed and must be repaired. |
Down |
6/8/2009 |
| TUB02-LPCVD Silicon Nitride, Tube 2 |
Needs complete cleaning and reassembly due to excess process by-product build-up. In process. Scheduled completetion 7/9 after vacation. Using vacuum pump from TUB01 Polysilicon. |
Down |
6/26/2009 |
| ETC04-Plasmatherm 770 SLR |
All facilities are now connected to the tool. We are working on turning on the pumps to evacuate the sytem. |
Down |
6/26/2009 |
| SEM02-Zeiss FE SEM |
Still issue with flcker but also power outage damaged EO board and possibly power supply.
AsB not working. Zeiss to escalate service issue on 7/1. - RJD |
Down |
6/30/2009 |
