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OSU Nanotech West »  IMR Shuttle Service Now Available

Equipment Status

Name Notes Status Updated
ALN01-Aligner 1 Lamp power supply out for evaluation. Please use ALN02. Down 3/31/2008
ETC03-Plasma Etcher Oxide The process chamber has a leak. We are using a helium leak detector to find the vacuum leak. Down 4/2/2008
ETC02-Plasma Etcher Poly/Nitride Vacuum pumps need to be restarted. Down 6/13/2008
SAT01-SAT Ozone Cleaning Damaged wire in hot DI heater assembly. Arranging evaluation of heater repair. Can run Fluorozone recipe. Contact Paul Steffen Partially Operational 4/2/2008